This article is short, so I'll post the whole thing here:
Source:
http://www.xbitlabs.com/news/story.html?id=1016580969
ntel has announced the first working SRAM (static memory) chips made with new 0.09 technology (not Pentium 4 with Prescott core yet, it will be demonstrated later). This remarkable event took place at Fab D1C factory in Hillsborough (Oregon).
The chips have a 52 Mbit volume, consist of 330 million (!) transistors with a square of only 109 mm2, and are made of 12-inch plates on lithographic equipment with the wavelength of 248 nm (old equipment) and 193 nm (new equipment). I will remind, that the serial production of the chips (including Pentium 4 CPUs) with 0.09-micron technology use is scheduled by Intel for year 2003.
Source:
http://www.xbitlabs.com/news/story.html?id=1016580969