AMD released a very interesting statement yesterday regarding their developments of newer CPU technologies. In conjunction with IBM, they have been working on Extreme Ultra-Violet (EUV) Lithography, a method of etching for the purpose of creating a circuit. The advantage EUV offers is that it is significantly more precise and uses a shorter wavelength, allowing denser circuits. AMD's announcement is that they have successfully produced a working chip using this technology, opening up new doors for them in terms of processor manufacturing.
Scaling processors down has faced brick walls at many points in history. EUV promises to allow significant further reduction of processor sizes, which will be critical as clock speeds continue to climb. The technology is still ways down the road however - with production goals aimed for as far out as 8 years from now. You can read the full press release at AMD's site.